压力传感器是工业实践中常用的一种传感器,广泛应用于各种工业自动控制环境,涉及水利水电、铁路运输、智能建筑、生产自动控制、航空航天、石油化工、油井、电力、船舶、机床、管道等诸多行业。这里简单介绍一些常用传感器的原理和应用,采用硅蓝宝石的测量特性作为半导体敏感元件。
Sapphire is composed of single crystal insulator elements, which will not cause hysteresis, fatigue and creep. Sapphire is stronger than silicon, has higher hardness and is not afraid of deformation; Sapphire has very good elasticity and insulation properties (1000
OC), therefore, the semiconductor sensor made of silicon-sapphire is insensitive to temperature changes and has good working characteristics even under high temperature conditions; Sapphire has strong radiation resistance; In addition, the silicon-sapphire semiconductor sensor has no p-n drift, thus fundamentally simplifying the manufacturing process, improving repeatability and ensuring high yield.
采用硅蓝宝石半导体敏感元件制成的压力传感器和变送器能在恶劣的工作条件下正常工作,可靠性高,精度好,温度误差小,性价比高。
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表压传感器和变送器由两块膜片组成:钛合金测量膜片和钛合金接收膜片。印刷有异质外延应变敏感电桥电路的蓝宝石薄片焊接在钛合金测量膜片上。测量的压力被传送到接收膜片(接收膜片和测量膜片通过拉杆牢固地连接在一起)。在压力的作用下,钛合金接收膜片变形。硅蓝宝石传感器感知到变形后,电桥的输出会发生变化,变化的幅度与测得的压力成正比。
传感器的电路可以保证应变电桥电路的供电,将应变电桥的不平衡信号转换成统一的电信号输出(0-5、4-20mA或0-5V)。在绝对压力传感器和变送器中,与陶瓷基玻璃焊料相连的蓝宝石片起到弹性元件的作用,将测得的压力转化为应变片的形变,从而达到压力测量的目的。